Hi,

if you can reach SJR 5740, you can get 20um thickness under the following
process.

1. spread 10s 200rpm
2. spin     15s 1500rpm
3. let substrate sit on the chunk for 5 min
4. softbake 6min 105C
5. expose 18s
6. develop 8min (microposit 354)

it need the humidity of environment higher than 40%.

Hong