Dear Mems-Talk members:
I am posting this for a collegue. Thanks for any suggestion.
Karim Faid

***************************************************************************
I am looking for a way to clean an Al layer from its native oxide in an etch
that wouldn't attack a photoresist.
The H3PO4+oxidant etches of the litterature will eat all organics I think.


Christophe Py
Institute for Microstructural Sciences, NRC Canada
M50-263, Montreal Road, Ottawa ON K1A0R6 Canada
Tel:(1)613-990-3598 Fax: (1)613-990-0202
Christophe.py@nrc.ca