I think that you can try piranah clean.
Good luck,


Fan

-----Original Message-----
From: Balaji Lakshminarayanan [mailto:lakshmin@eng.usf.edu]
Sent: Wednesday, July 03, 2002 11:10 AM
To: mems-talk@memsnet.org
Subject: Re: [mems-talk] Problems with liftoff(on quartz)


Hi,

What is the typical clean procedure you recommend (piranah etch or do you
have anything else in mind??).

thanks for your help

bala

----- Original Message -----
From: "Piao, Fan" 
To: 
Sent: Wednesday, July 03, 2002 12:19 PM
Subject: RE: [mems-talk] Problems with liftoff(on quartz)


> Hi,
>
> You may need to clean your wafer surface better before you put resist
> on. Polymer might be the cause for non-sticking surface.
> Good luck,
>
> Fan
>
> -----Original Message-----
> From: Balaji Lakshminarayanan [mailto:lakshmin@eng.usf.edu]
> Sent: Wednesday, July 03, 2002 5:04 AM
> To: mems-talk@memsnet.org
> Cc: mems-talk-admin@memsnet.org
> Subject: [mems-talk] Problems with liftoff(on quartz)
>
>
> Hi,
>
> I am having problems with developing photoresist on quartz wafer. The
> photoresist is not sticking to the quartz. Has anyone experienced
> similar problems. In particular, with AZ 5214E which i want to use for
> patterning metal using liftoff. The procedure that i followed is
>
> a) 1.50 HF dip for 15sec
> b) spin-on HMDS+AZ5214
> c) soft back @ 90C/60sec
> d) Expose for 8sec
> e) Hard bake for 110C/45sec
> f) Flood expose for 85sec.
>
> I followed the above procedure on glass and it worked well. Any help
> on
the
> same will be appreciated
>
> thanks
>
> bala
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