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Contact Lithography and Scanning
Contact Lithography and Scanning
Sreemanth M Venkata Uppuluri
2002-07-07
Hi Everyone,

I am looking for ways to scan my sample (which is a wafer coated with
resist) while in contact with a mask (which is a glass wafer containing
some patterns> during the exposing step. The contact is essential and also
the scanning. Has anyone tried this before? Please let me know.

Thanks
Sreemanth

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