Hi,
  Oxygen plasma etches PDMS very very slow while HF etches very fast.

yenwen

On Tue, 9 Jul 2002, Keyur Shah wrote:

> Hello everybody,
>
> I want to etch PDMS for my research work. Can anybody
> suggest me the ways to etch it? Is it possible to etch
> PDMS by using oxygen plasma? if yes, what is the etch
> rate?
>
> Thanking you all in anticipation,
>
> Keyur Shah
>
> =====
> Keyur Shah
> M.S(Chemical Engineering), Louisiana Tech University
> Research Assistant, Louisiana Tech University
> Apt#12, 106, South Homer Street,
> Ruston, Louisiana-71270,USA.
> phone no:318-513-9240
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