durusmail: mems-talk: Al evaporation
Al evaporation
2002-07-11
2002-07-12
2002-07-12
2002-07-12
Al evaporation
Zhihai Zhang
2002-07-11
Hello everyone,
I need do Al e-beam evaporation frequently.
However after several times, Al always spill out of the crucible and get the
crucible cracked. I use small ramp rate, it still happened.
How can I prevent it?
Thnaks,

Zhihai

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