Carsten, We can offer you LPCVD of low stress nitride (LSN), Stoichiometric nitride, HTO, LTO, PSG, Poly, and doped Poly on 8", 6", and 4" - this can give you a good start for Bulk Micromaching (LSN) and some surface micromachining applications. We do not do added fab work beyond these MEMS coatings on 8" currently, however there are other semi style fabs that can do the added post processing. We also offer PECVD (Nitride, OxyNitride, Oxide) 4", 6". Contact, Prox & Back-side alignment lithography on 4" & 6", Deep RIE (Bosch & Cryo) on 4" and 6", Precision Bulk Wet Micromaching on 4" and 6", Patterned Metallizaion (Sputtering, Evap, Solder) 4" and 6". Thermal Ox & Anneal(4", 6"). Epi Membranes (4", 6"). Similar to Carsten 80% of our business is on 4". We have 6 years experience in precision micromachining and are ISO-9001/9002 certified. Our company has recently restructured and will be focusing heavily on the micromachining market in the coming years. Regards, David Sherrer Haleos, Inc. 540-552-4610 x 3616 www.haleos.com -----Original Message----- From: Cain, Mike [mailto:Mike.Cain@jdsu.com] Sent: Friday, July 12, 2002 10:35 AM To: 'mems-talk@memsnet.org' Subject: RE: [mems-talk] 8" wafer foundries Carsten, It depends on what you are trying to accomplish. Scion is a recent JDSU acquisition that claim to use 8 inch wafers to produce waveguides. I work for the JDSU MEMS Business Unit (formerly Cronos Integrated Microsystems) which I consider a pure MEMS foundry because we manufacture a wide array of MEMS (Bulk, Surface, LIGA). We started as a 4 inch foundry and made an attempt at a 6 inch fab and then the market nose-dived. We ended up shelving the 6 inch fab (it's still empty, full of equipment) and currently use our 4 inch fab. The reason I say all this is because it is EXTREMELY difficult to make it as a 6 inch fab purely in MEMS. I dare say it is impossible to make it as an 8 inch MEMS foundry and I would be hesitant to believe anyone who claims to be one. That is not to say that there aren't companies producing MEMS on 8 inch wafers. It's just that these are very specific processes for very specific parts. Claiming to be able to have volume production on 8 inch wafer is easy. Delivering cost efficient volume production on 8 inch wafers will be a challenge. The infrastructure required to maintain an 8 inch wafer fab is expensive. We couldn't keep a 6 inch fab running and we had lots of demand (at the time). If you're interested in using a 6 inch wafer, let me know and I'll put you in contact with our sales guy. Cheers, Mike Cain Photolithography Engineering JDS Uniphase MEMS Business Unit 3026 Cornwallis Road P.O. Box 13942 Research Triangle Park, NC 27709 T-919-248-1828 F-919-248-1455 mike.cain@jdsu.com http://www.memsrus.com http://www.jdsuniphase.com -----Original Message----- From: Carsten Giebeler [mailto:carsten.giebeler@microemissive.com] Sent: Friday, July 12, 2002 7:07 AM To: mems-talk@memsnet.org Subject: [mems-talk] 8" wafer foundries Dear Colleagues, I am looking for MEMS foundries that are able to process 8" silicon wafers, medium to large volumes. Do you have any names/foundries that would do such things? Regards Dr. Carsten Giebeler MicroEmissive Display LTD The Scottish Microelectronics Centre Edinburgh EH9 3JF Scotland UK Tel: 0044 (0)131 6507754 Email: carsten.giebeler@microemissive.com Website: www.microemissive.com _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/ _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/