Zhihai,
Al alloys with the carbon and destroys it.  You need to use a BN crucible.
You can get them from RD Mathis Co.  If you get the insulating kind you can
take a piece of tungsten wire and loop it over the edge of the crucible so
that it touches the hearth.  Then the Al will be electrically connected to
the hearth.
Milan

-----Original Message-----
From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
Behalf Of Zhihai Zhang
Sent: Thursday, July 11, 2002 3:27 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Al evaporation


Hello everyone,
I need do Al e-beam evaporation frequently.
However after several times, Al always spill out of the crucible and get the
crucible cracked. I use small ramp rate, it still happened.
How can I prevent it?
Thnaks,

Zhihai
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