Ta has very good adhesion property but very poor
stress property.

- samrat

--- "Thomas B. Jones"  wrote:
> We are considering the use of Ta for simple coplanar
> electrode strips (10
> microns wide and 1000 microns long) patterned on
> quartz wafers, or maybe on
> top of an LTO layer deposited on the quartz.  I
> imagine we have to
> planarize to put this stuff down on the LTO, but are
> adhesion promoters
> needed?  Are there any serious pitfalls to avoid in
> the use of this metal?
> All suggestions or advice will be appreciated.
>
> T.B. Jones
>
>
>
________________________________________________________
> Thomas B. Jones
> Professor of Electrical Engineering
> University of Rochester
> P.O. Box 270126
> Rochester, NY  14627-0126    (USA)
> phone: 1-585-275-5233   fax: 1-585-273-4919
> email: jones@ece.rochester.edu
> http://www.ece.rochester.edu/~jones
>
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