We (U of Louisville, E.E. dept.) just had a SUSS CL200 installed with megasonic cleaning. So far, so good... -Mike >>> lukeghislain@yahoo.com 07/14/02 07:48PM >>> Hello, We are looking into megasonics wafer cleaning for the removal of particles down to the submicron level. Can anyone recommend vendors? Thanks, Luke Ghislain Yahoo! Autos - Get free new car price quotes _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/