>
> Would someone be so kind as to give me a good reference(s) for the
> "wagon-wheel" or "star-shaped" pattern that is sometimes used for
> determining anisotropic etch rates in silicon?  A reference for alternate
> test structures would also be appreciated.
>
> Thanks,
> Kevin Walsh
>
>
> --
> Dr. Kevin M. Walsh
> Electrical Engineering Department, Speed Scientific School
> University of Louisville, Louisville, KY 40292
> (502) 852-0826
>
> Internet address: kmwals01@starbase.spd.louisville.edu
>
>