durusmail: mems-talk: ZnO etching
ZnO etching
2002-07-22
ZnO etching
zz jj
2002-07-22
Hi, everyone:
I'm trying to get sharp pattern profile of ZnO, but the boundary slope is
slow.
The C axis of my film is along the surface of substrate.
I need some help to get sharp pattern edge etching.This etching is for mesa
only directly to the substrate.
thank you

zj




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