durusmail: mems-talk: spectral output of nitrogen and oxygen plasmas?
spectral output of nitrogen and oxygen plasmas?
2002-07-25
spectral output of nitrogen and oxygen plasmas?
Felix Lu
2002-07-25
Hi,

  Does anyone have any information on the spectral output of nitrogen and
oxygen plasmas particularly in the UV region? say at, 30 mTorr and 100 and
400W?

Felix
--
Felix Lu
Materials Science and Engineering
University of California at San Diego
flu@ucsd.edu

-- Please reply to flu@ucsd.edu, NOT felix@trouble.ucsd.edu --

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