durusmail: mems-talk: spectral output of nitrogen and oxygen plasmas?
spectral output of nitrogen and oxygen plasmas?
2002-07-25
spectral output of nitrogen and oxygen plasmas?
Matthew.Squires@Colorado.EDU
2002-07-26
I believe the Handbook of Chemistry and Physics has a good section on Spectral
lines of common gases.

There is another paper that I have read.  I think this is the reference.

F. Paresce, S. Kumar, and C.S. Bowyer. Continuous Discharge Line Source for the
Extreme Ultraviolet. Applied Optics, 10:1904{1908, 1971.

Also see page 99(76) of the following link

http://xuv.byu.edu/html/docs/theses/MSthesis.pdf

This was compiled from the CRC.

Good Luck,
Matt

Quoting Felix Lu :

> Hi,
>
>   Does anyone have any information on the spectral output of nitrogen
> and
> oxygen plasmas particularly in the UV region? say at, 30 mTorr and 100
> and
> 400W?
>
> Felix
> --
> Felix Lu
> Materials Science and Engineering
> University of California at San Diego
> flu@ucsd.edu
>
> -- Please reply to flu@ucsd.edu, NOT felix@trouble.ucsd.edu --
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