Hello,

We recently had a top-of-the-line STS ICP etcher installed at our
microfabrication facility here at Auburn University, and it works
beautifully.  Unfortunately, it sits idle most of the time.  We would be
happy to discuss working with you and anyone else needing DRIE in 4"
silicon wafers.

Sincerely,

Robert Dean

At 01:17 PM 7/31/02 +0200, you wrote:
>Hi MEMS-people,
>
>I'm looking for an ICP processing service for 4 inch (500 um thick)
>Si wafers, etching depth from 50 to 400 um, minimum feature size
>about 50 um, amount of wafers: 5-10. Fast processing time appreciated.
>Please contact me as soon as possible.
>
>Regards,
>--
>-----------------------------------------------------------------------------
>-
>Joachim Oberhammer, Dipl.-Ing.
>
>Royal Institute of Technology (KTH)   Phone:    +46/(0)8 790 6250
>Dep. of Signals, Sensors and Systems  Fax:      +46/(0)8 10 0858
>Microsystem Technology (MST)          Mobile:   +46/(0)70 692 1858
>                                       e-mail:   joachim.oberhammer@s3.kth.se
>Osquldas vdg 10                       homepage: http://www.s3.kth.se/mst/
>SE-100 44 Stockholm, Sweden
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