Roger,

Message: 7

Hi,

I am looking for a method of checking frontside-to-backside alignment at
develop inspect.  The photoresist pattern (on both sides of the silicon
wafer) is a little over a micron thick.  Years ago, AO (American Optical)
offered such a microscope. All suggestions will be appreciated.

Thanks in advance,
Roger Brennan

Endevco
355 N. Pastoria Avenue
Sunnyvale, CA 94085
(408)-739-3533 ext 204
roger.brennan@endevco.com

1403 Forrestal Ave.
San Jose, CA 95110
(408)-453-0711
rogerbr@earthlink.net
Roger Brennan

We built our own tool for front to back inspection  with a local supplier
and are currently working on  a more advanced tool. Our current
features and alignmnet criteria are very large.(Resist >3u, l/s > 50u, reg
20u)
I do belive that EVG does offer a commercial tool.

avi

Avi Laker
Teccor Electronics
972 756 8237   Office
214 439 6770   Pager