> Is there are relation between the silver sputtering rate and
> a gold spuutering
> rate . please give me the details, I am trying to use this
> Crssington sputer
> coater system 108 which does not have a thickenss
> reader/monitor. So I have
> the particular readings for gold sputtering which I got from the
> manufacturers. I am unable to figure out  the relation ship
> between gold and
> silver sputtering rates. I guess silver sputtering rate is
> comparitively less
> than gold but by HOW MUCH????

The sputtering rates are directly proportional to the sputter yields
(the number of sputtered metal atoms per incoming sputter-gas ion).
The sputter yield depends on the gas species (normally argon) that is ionized,
the ion energy, and angle.
Following is some data from a book by Kaufman and Robinson,
published by Commonwealth Scientific:

Gas ion: argon
Direction: normal to target
Energy = 200 eV: Ag yield = 1.60; Au yield = 1.11 --> Ag/Au = 1.44
Energy = 500 eV: Ag yield = 3.43; Au yield = 2.64 --> Ag/Au = 1.30
Energy =1000 eV: Ag yield = 3.77; Au yield = 3.61 --> Ag/Au = 1.04

Thus, under the same conditions,
the sputtering rate of silver is roughly 30% higher than for gold.

In your system, there will be a range of angles of incidence
as well as a range of energies.
You can look at your power supply to get an idea of the voltage
and hence the maximum ion energy.

        --Kirt Williams Agilent Technologies