durusmail: mems-talk: Information on Au metal line on silicon substrate
Information on Au metal line on silicon substrate
2002-08-03
Information on Au metal line on silicon substrate
Ken Kwon
2002-08-03
Hi,  I am trying to use gold metal lines on p+ and n+ silicon surface.  I am
in split decision between using TiW/TiW-N or Ti/Ti-N for underlying
diffusion barrier/adhesion layer.  Could someone tell me what's advantage of
using particular diffusion barrier/adhesion layer for gold metallization?
Reference books or articles are also appreciated.

Thank you

Ken

_________________________________________________________________
MSN Photos is the easiest way to share and print your photos:
http://photos.msn.com/support/worldwide.aspx

reply