Hi,

I am using SU-8 2100 (Microchem) to form structure with thickness of 100 um.
However, I could not find the correct recipe for SU-8 2100 from Microchem
website. I tried to use the recipe of SU-8 100 but could not get the correct
thickness.

Has any one successfully used SU-8 2100 to achieve uniform 100um layer ?

Thanks

Quang
Nanyang Technological University, Singapore