Dear MEMS friends,

I am using SU-8 5 (5um) and making 1um, 2um or 5um trench features. I followed
the Recipe from MicroChem, it seems not very good. There are always some
remainings in the small trench. And I also tried longer time to develop them,
and SU-8 start to peel off then. I wonder if somebody used SU-8 5 before and get
nice result with small features. Could you share your photolithography recipe?
Thanks for help,

Best regards,

Tingrui