durusmail: mems-talk: BCB
BCB
2002-08-14
BCB
Greg Miller
2002-08-14
Dear all,

I'm trying to dry etch BCB using a gray-scale does anyone know a
photoresist that etches at the same rate as BCB under O2+CF4 plasma

Thanks,

Greg Miller
KVH Industries
Email: gmiller@kvh.com

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