I've used an Ar plasma etch of Mylar and other materials in situ with good
results. The
subsequent thermal deposition of Au (1000A) adhered very well.

                                                                          Steve




At 11:08 PM 8/13/02 -0700, you wrote:
>Dear MEMS community:
>
>I want to put gold on some plastic substrate by
>evaporation, either thermal or e-beam. Does any one
>know which kind of plastic can survive for this
>application. BTW, how to clean plastic wafers?
>Any comments is appreciated.
>
>Lisen
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