You will have three inverted pyramid in tendom. look at my paper in "sensors
and actuators" 1999.

----- Original Message -----
From: "Gao, Yuanfang (UMC-Student)" 
To: 
Sent: Saturday, August 10, 2002 1:16 AM
Subject: [mems-talk] KOH etching from both sides


> Hi, folks,
>
> A question about KOH etching. If two exactly co-centered squares are
opened on both sides of a DSP 100 nitride coated wafer, the sizes are
different, but the etching deepth will overlap with each other, and a
through hole is expected. The question is what happens at the intersection
point of the two piramid hole? Will the sharp edges be etched away or well
kept? If there is misalignment of the two square holes, then what will
happen at the meet point?
>
> Any idear is appreciated, esp. those direct experiences on this.
>
> Y. Gao
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