Be sure to practice with a dummy chip. Unless your frequency tripling
into the near UV you will have to deal with a pretty severe thermal load
from the laser. It will likely cause a significant amount a chipping,
cracking and other thermal damage. The best laser is an excimer at 157
nm, F2. You can out source to a laser job shop. You can try JPSA Laser @
603-595-7048

-Mike


>>> weiwei2@pd.jaring.my 08/16/02 10:32AM >>>
Dear everybody

     i have a released MUMPS chip. Is it possible subdice it without
killing' my microstructure?

     what can i do?

     I plan to use YAG laser to 'subdice' it---> which i have access.
Is
that bit overkill?

Leow
_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk

Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/