Hello Bo,
I just started looking for the same information, this is all I've found so
far: http://www.ucop.edu/research/micro/98_99/98_144.pdf.
Suzanne

-----Original Message-----
From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
Behalf Of Bo He
Sent: Monday, August 19, 2002 12:04 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Patternable PDMS


Dear MEMS expert:

        Are there any articles about how to pattern PDMS by conventional
photolithography? Any input is highly appreciated.



Bo



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