Hello, everyone,

Does anyone have some experience doing Si-Si bonding with LPCVD nitride
& anneal process?
Normally we know we can do the fusion bonding by oxide layer, but how
about nitride?
If we want to do this process, can we do the LPCVD nitride on both
wafers?
Please tell me where to fine the reference.

Thanks for your great help,

Tulip