Our TESG ( www.tegs.ru )company offer producing of MEMS structures:
Using desired combination of glasses with different chemical resistance to
solvents, special geometric arrangement of the fibers in a bundle, glass tubes
filled with low melting temperature conductors, and our drawing technique, we
can produce thin fibers with very complicated structure of its cross-section.
Desired structures are obtained after cutting, polishing, and etching. Our MSGT
technology offers high yields and reliability.
A MEMS electrical driver is available now.
Twelve PbSn-filled channels form the driver stator (diameter is 150 mm (Figure
2). The NiFeB magnet was used as a rotor and was placed to the central hole of
stator.
The motor is able to work in vacuum. Our technology allows to fabricate all
elements (stator, rotor, and bearings) of the motor with sizes about 0.2 - 2 mm
in one technological step
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Best regards, Nikita Tomilovsky.
TEGS, JSC
TEGS, pr-t Stroitelej 1, Saratov, Russia, 410044.
Phone: +78452376047,+78452376077
Fax: +78452333492,+78452333769
Email: tegs@mail.saratov.ru
Internet: www.tegs.ru