durusmail: mems-talk: SOI wafer needed and one question about soi
SOI wafer needed and one question about soi
2002-08-21
2002-08-22
2002-08-22
2002-08-22
SOI wafer needed and one question about soi
weibin zhang
2002-08-21
Hi,all

I need some SOI wafer for my processing.  Can someone give any information?  I
need the device layer should be well conductive. Does anyone has any idea what
is the maximum resistivity should that require?

other specifications for the soi wafer :

device layer:   15-50 microns
box layer :     > 1 micron
substrate :  resistivity >> resistivity of device layer

thanks

weibin

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