Dear Tulip,

a good reference is the Max-Planck-Institution in Halle Germany. They are
specialists in SDB.

Markus.

SUSS MicroTec
Business Field MEMS
Markus Gabriel
Schleissheimer Str. 90
85748 Garching
Germany
Fon     +49 89 32007 - 313
Fax     +49 89 32007 - 390
email   m.gabriel@suss.de
http://www.suss.com/mems

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Message: 8
Date: Wed, 21 Aug 2002 04:43:59 +0800
From: Tulip 
To: mems-talk@memsnet.org
Subject: [mems-talk] Bonding with Nitride
Reply-To: mems-talk@memsnet.org

Hello, everyone,

Does anyone have some experience doing Si-Si bonding with LPCVD nitride
& anneal process?
Normally we know we can do the fusion bonding by oxide layer, but how
about nitride?
If we want to do this process, can we do the LPCVD nitride on both
wafers?
Please tell me where to fine the reference.

Thanks for your great help,

Tulip

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