durusmail: mems-talk: SOI wafer needed and one question about soi
SOI wafer needed and one question about soi
2002-08-21
2002-08-22
2002-08-22
2002-08-22
SOI wafer needed and one question about soi
Lawlor, Chris
2002-08-22
Hi Weibin,
Please contact me off line. We have a list of stock which may be of use to
you.
Best wishes,
Chris...



-----Original Message-----
From: weibin zhang [mailto:weibin@engineering.ucsb.edu]
Sent: 21 August 2002 19:27
To: mems-talk@memsnet.org
Subject: [mems-talk] SOI wafer needed and one question about soi


Hi,all

I need some SOI wafer for my processing.  Can someone give any information?
I
need the device layer should be well conductive. Does anyone has any idea
what
is the maximum resistivity should that require?

other specifications for the soi wafer :

device layer:   15-50 microns
box layer :     > 1 micron
substrate :  resistivity >> resistivity of device layer

thanks

weibin
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