You can ask

Sico Meiningen Wafer GmbH
Jerusalemerstr. 13
D-98611 Meiningen
Germany
Tel 011 49 3693 71313
Fax 011 49 3693 71315
e-mail: Sicomei@t-online.de

Greetings
Stefan

-----Original Message-----
From: weibin zhang [mailto:weibin@engineering.ucsb.edu]
Sent: Mittwoch, 21. August 2002 20:27
To: mems-talk@memsnet.org
Subject: [mems-talk] SOI wafer needed and one question about soi


Hi,all

I need some SOI wafer for my processing.  Can someone give any information?
I
need the device layer should be well conductive. Does anyone has any idea
what
is the maximum resistivity should that require?

other specifications for the soi wafer :

device layer:   15-50 microns
box layer :     > 1 micron
substrate :  resistivity >> resistivity of device layer

thanks

weibin
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