Dear MEMS researchers,

I am trying to find some information about spin-on sources for deep boron
diffusion (to be used as an etch stop for EDP etching).

I would appreciate any information on commercial vendors & manufacturers for
the spin-on boron sources. In addition, if any one has any experience with
using spin-on sources for deep boron diffusion, I would appreciate
any information on the quality, performance, profile etc.

In addition, I need to locate companies/labs that can do deep boron
diffusion, using either liquid sources or spin-on sources, as a
commerical service.

Thank you,

-Sonbol Massoud-Ansari