durusmail: mems-talk: Al2O3 etch rate
Al2O3 etch rate
2002-08-27
2002-08-28
Al2O3 etch rate
Kishan Gupta
2002-08-28
Just from my own experience, the Al203 etch rate in 5:1 BHF is around 160
nm/min. Perhaps that will be somewhat helpful to you. In terms of
documentation, I have been also trying to find some literature on the
subject and I have come up short as well.

-- Kishan Gupta
E.E.C.S. Student at U.C. Berkeley; Berkeley, CA

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