hi
i am using ansys currently for doing mems problems. i find it a good software
but the results that we get from ansys will be limited and i think coventorware
will be the best to use if you want to do mems problems as it is a commercial
mems problems and researchers are using that. i tried that but no ones using it
in my school and i found the software hard and gave it up so i am using ansys.
if you are into hardcore mems i would suggest coventor. if you want quick fast
easy and approxiamate results i would say ansys
hope this helps
amar