durusmail: mems-talk: Is there an industrial standard for determination of Photoresist thickness?
Is there an industrial standard for determination of Photoresist thickness?
2002-09-03
2002-09-04
Is there an industrial standard for determination of Photoresist thickness?
Phang Jyh Siong
2002-09-03
Hi, I am wondering if there is any standard for the determination of Photoresist
thickness when coated on Si wafer? If no, what is the common practise? Thanks
for your help.

Best Regards,

Phang Jyh Siong
Department of Mechanical Engineering (MSTI Portal)
National University of Singapore



reply