durusmail: mems-talk: lift off problem
lift off problem
2002-09-03
2002-09-04
lift off problem
W.H. Teh
2002-09-04
I do it in acetone at room temperature and no problem. Make sure the
thickness of your metal is about 1/3 (better still less) than the thickness
of the PMMA resist.

WH

On Sep 4 2002, Sungjun Lee wrote:

> Does anyone who knows about the lift-off of PMMA? I have usually done it
> under boiling Acetone. Is there any difference of behavior under between
> pure Acetone and boiling? By the way, I welcom to receive any comment
> about the lift off method. Thanks in advance.
>
> S. Lee / Graduate Student
>
>
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