There is a tool called a nanospec to measure thin-film thicknesses that is typically used in most research facilities, at least that's what I have used in the past to measure PR thickness on Si. Here is the link to the company http://www.nanometrics.com -----Original Message----- From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org] On Behalf Of Phang Jyh Siong Sent: Tuesday, September 03, 2002 6:03 PM To: mems-talk@memsnet.org Subject: [mems-talk] Is there an industrial standard for determination of Photoresist thickness? Hi, I am wondering if there is any standard for the determination of Photoresist thickness when coated on Si wafer? If no, what is the common practise? Thanks for your help. Best Regards, Phang Jyh Siong Department of Mechanical Engineering (MSTI Portal) National University of Singapore _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/