durusmail: mems-talk: Polyimide for plannarization
Polyimide for plannarization
2002-09-09
2002-09-11
Polyimide for plannarization
Zhimin J Yao
2002-09-09
Hello,

I need a polyimide that has a better than 50% degree of plannarization,
about 3 microns thick.  Wet etchable preferred.  Can anyone tell me where I
can find it?  I have checked HDmicrosystem's web page.

Thanks,
Z. Jamie Yao



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