Hello,
How much thickness you want?
If the thickness is less than few microns.
We can deposit AuNi(5wt%) film on 150mm wafers regardless of any vapor
pressure difference.

Sang Lee

Fionix, Inc.
58-4 Hwaam-dong Yuseong-gu
Daejeon, 305-732, S. Korea
email; sanghai@fionix.com
Tel; 82-42-866-6600
Fax; 82-42-866-6538

----- Original Message -----
From: "TEL Klaus Beschorner" 
To: 
Sent: Thursday, September 12, 2002 4:51 AM
Subject: [mems-talk] Gold-Nickel coating service


>
> Hello,
> can anybody please refer me to a company that could do a small coating
> job for one my customers ?
>
> Substrates: ca. 20  150mm SEMI-standard wafers
> Deposition: magnetron sputter, UHV preferred, evaporation ??
> Material:   Gold - Nickel (5wt% Ni)
>
> I guess the key point would be the availability of the target,
> buying a target just for this job is out of the question.
>
> thanks and
> best regards
> klaus
> --
>
> (TEEL) Tokyo Electron Europe Limited
> PVD Process Support  (ex MRC)
> Klaus Beschorner    Tel +49-7033-45683
> Drosselweg 6    Fax +49-7033-45631
> 71120 Grafenau, Germany       Mobile +49-174 315 7754
>
>
>
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