durusmail: mems-talk: Chrome Etchant
Chrome Etchant
2002-09-17
2002-09-23
Antje Wiegand (2 parts)
Chrome Etchant
Antje Wiegand
2002-09-23
Hi Mike,

try 165g (NH4)2Ce(NO3)6 and 43 ml HClO4 in 1000ml water.

Antje

Michael Roper schrieb:

> Hello,
>
> I just ordered some chrome etchant from a commercial supplier, but it is going
> to take ~ 2 weeks to get here and I would like to have it fairly soon.  I've
> seen that HCl and H2O2 will etch chrome, and I was wondering if this mixture
> would also remove photoresist?  Does anyone know a homemade chrome etch
> solution that will not attack photoresist?  Thanks for any help you can give.
>
> Mike
> --
> Michael Roper
> University of Michigan
> Department of Chemistry
> 1500 N. University #4730
> Ann Arbor, MI 48108
> 734-615-4376
>
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