Hi, All,

I am trying to find a sacrificial layer for ZnO film. It seems that etchant
for SiO2 or Si3N4 also attacks ZnO, does any one know how to etch SiO2 or
Si3N4 without attacking ZnO? Or any one knows there is another material
which can be used as sacrificial layer? Thanks a lot for your help.

Sincerely yours,

Qihuo Wei

Department of Mechanical & Aerospace Engineering
UCLA
Los Angeles, CA 90095
Tel: 310 825 7413
Fax: 310 206 2302