durusmail: mems-talk: Sense circuit for comb-drive lateral resonator
Sense circuit for comb-drive lateral resonator
2002-09-25
Sense circuit for comb-drive lateral resonator
Peter Cumpson
2002-09-25
Hello everyone,

Does anyone know a good description of an off-chip sense circuit for use
with a typical comb-drive polysilicon lateral resonator, e.g. one
fabricated in the MUMPs process? One often sees block diagrams in papers
labelled "transimpedance amplifier" or similar, but I have yet to find
an actual circuit diagram or helpful hints about the practical issues of
minimising parasitic capacitances. I cannot find many details on the
web, either.

Does anyone know a good write-up, perhaps even from a student project or
similar, describing the details of a circuit known to work well?

Peter Cumpson

============================================
Dr. P J Cumpson
Building 15
Centre for Optical and Analytical Measurement
National Physical Laboratory
Teddington, Middlesex TW11 0LW
United Kingdom
Tel: +44 (0) 208-943-7177
Fax: +44 (0) 208-614-0434
Alternative Fax: +44 (0) 208-943-6453
Email: peter.cumpson@npl.co.uk
Web page: http://www.npl.co.uk/npl/cmmt/sis/index.html
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