> Subject: [mems-talk] Silver Dry Etch
>
> I am looking to see if there is anyone familiar with a dry etch for Silver. I
have done a lot of research on this but
> cannot seem to find anything concrete. Can anyone refer some papers or give
any suggestions? Thank you.
>
> Jean Tokarz


Here's a couple from ASU in Tempe :

1. "Reactive ion etch of patterned and blanket silver thin films in Cl2/O2 and
O2 glow discharges"
P. Nguyen et. al, J. Vac. Sci. Technol. B 17(5), Sep/Oct 1999, pp. 2204 - 2209

2. "Advanced silver-based metallization patterning for ULSI applications"
T.L. Alford et. al., Microelectronic Engineering 55 (2001), pp. 383 - 388

Cheers,

Greg Mattiussi
Spectalis Corp.