durusmail: mems-talk: LTO on Au
LTO on Au
2002-09-30
2002-10-01
LTO on Au
Rob Davis
2002-10-01
Washington Technology Center, Fluke Hall, Seattle Washington...talk to Eric
Miller..lab manager....good quality and timely.....used them two weeks ago....
Rob Davis

>----- Original Message -----
>From: Xing Yang 
>To: mems-talk@memsnet.org
>Sent: Mon, 30 Sep 2002 -0700 (PDT) 10:27:31
>
>
>I am looking for LTO deposition service on wafers
>with patterned Au
>structures. Since Au is a contamination for IC
>processes, most of
>the foundry places I have contacted in US do not
>allow wafers with Au
>to go into their furnaces. I wonder if anyone knows
>places that could
>do such a process for a small quantity of wafers. I
>am open to suggestions
>in Europe and Japan too.
>
>Thanks.
>
>Xing Yang
>
>
>
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