Dear Rahul

I see that you are sputtering SnO2. I am interested in this and wonder
if you have any references. Are you reactively sputtering from an Sn
target in Ar/O2 atmosphere, or are you sputtering from a Sn target?


Regards


Richard Haigh

-----Original Message-----
From: Mr. Rahul Mishra [mailto:rahul@isu.iisc.ernet.in]
Sent: 03 October 2002 17:01
To: Vijaykumar G
Cc: mems-talk@memsnet.org
Subject: [mems-talk] SnO2 Etchant

Hi
Can anybody tell me the etchant for Sno2, deposited using DC Magnetron
Sputtering on Si substrate with Gold Electrodes ?





Rahul Mishra
Research Student (M.Sc.(Engg))
Department of Instrumentation
IISc, Bangalore-560012
Ph. : 394 2349
==============================
Students' Hostel, E-67
Ph. : 394 2622

rahulmishra79@rediffmail.com
rahulmischra@hotmail.com


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