Has anybody obtained or estimated the Dill parameters (for simulation) of the
AZ5214 resist?

Torben

Torben Mikael Hansen
Ph.D. Student
Mikroelektronik Centret
Technical University of Denmark
Building 345e
DK-2800 Kgs. Lyngby
Phone   +45 45255731
Lab.      +45 45255812
Fax       +45 45887762
Mobile   +45 29723863
tmh@mic.dtu.dk