Hi Li,

        Amorphous Silicon can be used as a mechanical material for beams and
membranes. The effective Young's modulus is around 160 GPa.
        Here at INESC MN, we have been doing thermal and electrostatic
actuators/resonators (with resonances up to 20-30 MHz) using a-Si:H low-T
deposited (100 ºC) as a structural layer for bridges and cantilvers.
        Here go some references: Thin Film Microelectromechanical Systems, V.
Chu
et al., Mat. Res. Soc. Symp. Proc., Vol. 715, A12.3, 2002; Integrated
Magnetic Sensing of Electrostatically Actuated Thin Film Microbridges, J.
Gaspar et al., Mat. Res. Soc. Symp. Proc., Vol. 729, U3.7, 2002; Thermal
actuation of thin film microelectromechanical structures, J. Gaspar et al.,
J. Non-Crystalline Solids 299-302 (2002) 1224-1228; Microelectromechanical
system microbridge deflection monitoring using integrated spin valve sensors
and micromagnets, H. Li et al. J. Appl. Phys., vol. 91, no. 10, 7774-7776,
2002. If you can not get those papers don't hesitate to ask me at
jgaspar@inesc-mn.pt. I can send you the pdf files. I can give you later more
references if you need. (Check our website at http://www.inesc-mn.pt)
        I hope I could help you.
Best regards,
Joao Gaspar


********************************
Joao Gaspar
INESC Microsystems and Nanotechnologies
Rua Alves Redol,9
1000-029 Lisboa
Portugal

Tel: 351-21-3100237
Fax: 351-21-3145843
email: jgaspar@inesc-mn.pt   NOTE NEW E-MAIL ADDRESS!!
URL: www.inesc-mn.pt         NOTE NEW URL!!
********************************

From: "li gang" 
To: mems-talk@memsnet.org
Date: Sun, 06 Oct 2002 21:51:11 +0800
Subject: [mems-talk] amorphours silicon's mechnical characteristics.
Reply-To: mems-talk@memsnet.org

Dear all,

I wonder if amorphous silicon could be used as mechanical structure such as
beam, membrane. How about its mechanical characteristics? Why we always use
polysilicon but not amorphours silicon as mechanical structure? Are there
any paper about this topic?
Any advice will be greatly appreciated.

Regards,

Li Gang


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