durusmail: mems-talk: thick aluminum film on wafers
thick aluminum film on wafers
thick aluminum film on wafers
Renie Duvall
2002-10-08
What diameter,type and qty of wafers? And which type of Al are you looking
for?
Aluminum PVD Pure
Aluminum/1% Silicon
Aluminim/2% Silicon
Aluminum/1% Siliocn/0.5% Copper
Aluminum/1% Silicon/1.0% Copper
Aluminum/1% Silicon/2.0% Copper
Aluminum/0.5% Copper
Aluminum/1.0% Copper
Aluminum/2.0% Copper
Aluminum/4.0% Copper
Aluminum/1% Silicon/0.15% Titanium

On Mon, 7 Oct 2002 15:37:49 -0500 (CDT) tdv218@hecky.it.northwestern.edu
wrote:

> Hi all.  I am trying to find a company that
> either supplies silicon wafers
> coated with a thick film of aluminum (2-10
> micron) or one that will do
> electroplating and chemical-mechanical
> polishing to achieve a thick aluminum
> film with surface roughness minimized.  All the
> aluminum plated wafers I've
> found have had very thin films (



1-360-263-8011


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