Hi, everyone

Is there anyone who has the experience about loading effect in DRIE? How
severe it will be? I have a sample and would like to use DRIE to etch
several width of channels (4, 30, 60, 150, and 300 um wide). If the 300 um
wide channel has been etched for 200 um deep, how the etching depth of
others will vary? Can we either increase/decrease this loading effect? Your
answer or any input will be greatly appreciated.

YoYo



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