Thanks for info. You mention causes of stiction that I have not heard before. John > -----Original Message----- > From: OFIR DEGANI [SMTP:ofird@techunix.technion.ac.il] > Sent: Wednesday, October 16, 2002 10:36 AM > To: mems-talk@memsnet.org > Subject: RE: [mems-talk] Re: stiction of contacting surfaces > Importance: High > > Hi, > > There could be several mechanisms that cause permanent stiction of working > device. These depend on the operation procedure and packaging. > > I encountered several of the following problems: > > 1) If you have dielectric layer than charging may cause that. > > 2) If you don't use vaccum or dry N2 encapsulation than you may still have > problem with high humidity that may cause stiction, similar to what happen > on the wet rlease process. > > 3) Depending on the stiffness of your device you may encounter the Casimir > effect that is known to cause stiction for devices with low stiffness > > 4) I also encountered problem with short circuiting of electrode that > caused > fusion of the electrodes. > > 5) small dust particles between the electrode may also burn due to short > circuiting and cause stiction > > > To avoid most of the above I never use dielectric coating, use vacuum > encapsulation and the most important is using landing electrodes that have > the same potential as the actuator and don't short circuit the electrodes. > This way I manage to run the device for milions of cycles without any > problems. > > Hope this will be helpful for you > > SHALOM > > Ofir > > -----Original Message----- > From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On > Behalf Of Fende, John R. > Sent: Wednesday, October 16, 2002 3:33 PM > To: mems-talk@memsnet.org > Subject: RE: [mems-talk] Re: stiction of contacting surfaces > > > It seems Wenlin is talking about stiction occuring after fabrication, > where > van der waals and surface tension are out of the picture. Do you have any > knowledge of causes of stiction after a working device is activated > several > times? > > John Fende > > > -----Original Message----- > > From: J [SMTP:jhwen@ycity.com.tw] > > Sent: Thursday, October 10, 2002 5:57 PM > > To: mems-talk@memsnet.org > > Subject: [mems-talk] Re: stiction of contacting surfaces > > > > Dear Wenlin, > > mainly the stiction comes from dry process. water capillary force may > draw > > beam towards substrate and other forces like van der waals or surface > > tension developed. > > the solutions might be heat up when you dry it, or use solution such as > > IPA to lower the surface tension, XeF2 or CO2 for supercritical > > sublimation, or simply modify your layout structures for anti stiction. > > good luck. > > > > Inst. of MEMS, NTHU > > > > > > Message: 8 > > To: mems-talk@memsnet.org > > From: Wenlin.Jin@jdsu.com > > Date: Thu, 10 Oct 2002 09:58:02 -0400 > > Subject: [mems-talk] stiction of contacting surfaces > > Reply-To: mems-talk@memsnet.org > > > > Hello: > > > > I'm working on electrostatic curved beams. It has been observed that > > after certain cycles of operation, stiction of the beam to substrate > > occurs. I'm wondering if there are researches done on the mechanism of > the > > stiction and how it can be avoided. Any information will be appreciated. > > > > Best regard > > > > Wenlin Jin > > > > > > > > _______________________________________________ > > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > Hosted by the MEMS Exchange, providers of MEMS processing services. > > Visit us at http://www.memsnet.org/ > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/ > > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/